IP Library › Granted Patent US 5,258,265
Granted Patent Utility
US 5,258,265 · App. 07/980,057

Aqueous developable deep UV negative resist

Inventors: Sydney George Slater, Stanley A. Ficner
Patented Case View Patent ↗
Granted: Nov 2, 1993 Filed: Nov 23, 1992
Inventors
Sydney George Slater
Stanley A. Ficner
Assignee (at issue)
Olin Corporation

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Quick Facts
Patent No.
US 5,258,265
App. No.
07/980,057
Filed
1992-11-23
Granted
1993-11-02
Kind
A