IP Library Granted Patent US 5,259,888
Granted Patent Utility
US 5,259,888 · App. 07/830,688

Process for cleaning quartz and silicon surfaces

Inventor: Scott McCoy
Patented Case View Patent ↗
Granted: Nov 9, 1993 Filed: Feb 3, 1992
Inventor
Scott McCoy
Assignee (at issue)
SACHEM, INC.

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Quick Facts
Patent No.
US 5,259,888
App. No.
07/830,688
Filed
1992-02-03
Granted
1993-11-09
Kind
A