IP Library › Granted Patent US 5,262,002
Granted Patent Utility
US 5,262,002 · App. 07/955,464

Method for manufacturing a trench structure in a substrate

Inventors: Virinder Grewal, Siegfried Schwarzl
Patented Case View Patent ↗
Granted: Nov 16, 1993 Filed: Oct 2, 1992
Inventors
Virinder Grewal
Siegfried Schwarzl
Assignee (at issue)
Siemens Aktiengesellschaft

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Quick Facts
Patent No.
US 5,262,002
App. No.
07/955,464
Filed
1992-10-02
Granted
1993-11-16
Kind
A