Granted Patent
Utility
US 5,262,283 · App. 07/692,364
Method for producing a resist structure
Inventors:
Recai Sezi, Horst Borndorfer, Eva Rissel, Rainer Leuschner, Michael Sebald, Hellmut Ahne, Siegfried Birkle
Patented Case
View Patent ↗
Granted: Nov 16, 1993
Filed: Apr 26, 1991
Inventors
Recai Sezi
Horst Borndorfer
Eva Rissel
Rainer Leuschner
Michael Sebald
Hellmut Ahne
Siegfried Birkle
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.