IP Library Granted Patent US 5,262,352
Granted Patent Utility
US 5,262,352 · App. 07/937,025

Method for forming an interconnection structure for conductive layers

Inventors: Michael P. Woo, James D. Hayden, Richard D. Sivan, Howard C. Kirsch, Bich-Yen Nguyen
Patented Case View Patent ↗
Granted: Nov 16, 1993 Filed: Aug 31, 1992
Inventors
Michael P. Woo
James D. Hayden
Richard D. Sivan
Howard C. Kirsch
Bich-Yen Nguyen
Assignee (at issue)
Motorola, Inc.

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Quick Facts
Patent No.
US 5,262,352
App. No.
07/937,025
Filed
1992-08-31
Granted
1993-11-16
Kind
A