IP Library › Granted Patent US 5,268,317
Granted Patent Utility
US 5,268,317 · App. 07/790,953

Method of forming shallow junctions in field effect transistors

Inventors: Udo Schwalke, Christoph Zeller, Heinrich Zeininger, Wilfried Hansch
Patented Case View Patent ↗
Granted: Dec 7, 1993 Filed: Nov 12, 1991
Inventors
Udo Schwalke
Christoph Zeller
Heinrich Zeininger
Wilfried Hansch
Assignee (at issue)
Siemens Aktiengesellschaft

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Quick Facts
Patent No.
US 5,268,317
App. No.
07/790,953
Filed
1991-11-12
Granted
1993-12-07
Kind
A