IP Library Granted Patent US 5,268,951
Granted Patent Utility
US 5,268,951 · App. 07/994,744

X-ray beam scanning method for producing low distortion or constant distortion in x-ray proximity printing

Inventors: Alexander L. Flamholz, Robert P. Rippstein, Jerome Paul Silverman, Matthew A. Thompson
Patented Case View Patent ↗
Granted: Dec 7, 1993 Filed: Dec 22, 1992
Inventors
Alexander L. Flamholz
Robert P. Rippstein
Jerome Paul Silverman
Matthew A. Thompson
Assignee (at issue)
International Business Machines Corporation

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Quick Facts
Patent No.
US 5,268,951
App. No.
07/994,744
Filed
1992-12-22
Granted
1993-12-07
Kind
A