Granted Patent
Utility
US 5,278,021 · App. 08/045,022
O-naphthoquinone diazide sulfonyl esters of 4-(4-hydroxyphenyl)cyclohexanone phenolic derivatives with associated radiation sensitive mixtures and articles
Inventors:
Alfred T. Jeffries, III, Medhat A. Toukhy
Patented Case
View Patent ↗
Granted: Jan 11, 1994
Filed: Apr 5, 1993
Inventors
Alfred T. Jeffries, III
Medhat A. Toukhy
Assignee (at issue)
OCG Microelectronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.