Granted Patent
Utility
US 5,278,077 · App. 08/028,832
Pin-hole patch method for implanted dielectric layer
Inventor:
Tatsuo Nakato
Patented Case
View Patent ↗
Granted: Jan 11, 1994
Filed: Mar 10, 1993
Inventor
Tatsuo Nakato
Assignee (at issue)
Sharp Microelectronics Technology Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.