Granted Patent
Utility
US 5,280,437 · App. 07/723,170
Structure and method for direct calibration of registration measurement systems to actual semiconductor wafer process topography
Inventor:
Daniel A. Corliss
Patented Case
View Patent ↗
Granted: Jan 18, 1994
Filed: Jun 28, 1991
Inventor
Daniel A. Corliss
Assignee (at issue)
Digital Equipment Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.