IP Library Granted Patent US 5,284,057
Granted Patent Utility
US 5,284,057 · App. 07/976,100

Microaccelerometer having low stress bonds and means for preventing excessive Z-axis deflection

Inventors: Steven E. Staller, David W. De Roo
Patented Case View Patent ↗
Granted: Feb 8, 1994 Filed: Nov 13, 1992
Inventors
Steven E. Staller
David W. De Roo
Assignee (at issue)
DELCO ELECTRONICS CORPORATION

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Quick Facts
Patent No.
US 5,284,057
App. No.
07/976,100
Filed
1992-11-13
Granted
1994-02-08
Kind
A