Granted Patent
Utility
US 5,286,657 · App. 07/809,799
Single wafer megasonic semiconductor wafer processing system
Inventor:
Mario E. Bran
Patented Case
View Patent ↗
Granted: Feb 15, 1994
Filed: Dec 18, 1991
Inventor
Mario E. Bran
Assignee (at issue)
Verteq, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.