Granted Patent
Utility
US 5,286,660 · App. 07/996,747
Method for doping a semiconductor wafer having a diffusivity enhancement region
Inventors:
Herng-Der Chiou, Gary G. Ehlenberger, Earl D. Fuchs
Patented Case
View Patent ↗
Granted: Feb 15, 1994
Filed: Dec 24, 1992
Inventors
Herng-Der Chiou
Gary G. Ehlenberger
Earl D. Fuchs
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.