IP Library › Granted Patent US 5,287,082
Granted Patent Utility
US 5,287,082 · App. 07/906,877

Submicron isolated, released resistor structure

Inventors: Susanne Arney, Noel C. MacDonald, Jun Yao
Patented Case View Patent ↗
Granted: Feb 15, 1994 Filed: Jul 2, 1992
Inventors
Susanne Arney
Noel C. MacDonald
Jun Yao
Assignee (at issue)
Cornell Research Foundation, Inc.

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Quick Facts
Patent No.
US 5,287,082
App. No.
07/906,877
Filed
1992-07-02
Granted
1994-02-15
Kind
A