Granted Patent
Utility
US 5,288,325 · App. 07/853,618
Chemical vapor deposition apparatus
Inventor:
Hideki Gomi
Patented Case
View Patent ↗
Granted: Feb 22, 1994
Filed: Mar 18, 1992
Inventor
Hideki Gomi
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.