IP Library Granted Patent US 5,288,327
Granted Patent Utility
US 5,288,327 · App. 08/108,779

Deflected flow in chemical vapor deposition cell

Inventor: Rajaram Bhat
Patented Case View Patent ↗
Granted: Feb 22, 1994 Filed: Aug 18, 1993
Inventor
Rajaram Bhat
Assignee (at issue)
Bell Communications Research, Inc.

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Quick Facts
Patent No.
US 5,288,327
App. No.
08/108,779
Filed
1993-08-18
Granted
1994-02-22
Kind
A