IP Library › Granted Patent US 5,289,692
Granted Patent Utility
US 5,289,692 · App. 08/005,606

Apparatus and method for mass flow control of a working fluid

Inventors: Chester D. Campbell, Sandra L. Harper
Patented Case View Patent ↗
Granted: Mar 1, 1994 Filed: Jan 19, 1993
Inventors
Chester D. Campbell
Sandra L. Harper
Assignee (at issue)
Parker-Hannifin Corporation

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Quick Facts
Patent No.
US 5,289,692
App. No.
08/005,606
Filed
1993-01-19
Granted
1994-03-01
Kind
A