Granted Patent
Utility
US 5,290,382 · App. 07/807,536
"Methods and apparatus for generating a plasma for ""downstream"" rapid shaping of surfaces of substrates and films"
Inventors:
Charles B. Zarowin, L. David Bollinger
Patented Case
View Patent ↗
Granted: Mar 1, 1994
Filed: Dec 13, 1991
Inventors
Charles B. Zarowin
L. David Bollinger
Assignee (at issue)
Hughes Aircraft Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.