Granted Patent
Utility
US 5,290,709 · App. 07/865,961
Method of manufacturing semiconductor device
Inventor:
Akira Sato
Patented Case
View Patent ↗
Granted: Mar 1, 1994
Filed: Apr 9, 1992
Inventor
Akira Sato
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.