Granted Patent
Utility
US 5,291,012 · App. 07/872,525
High resolution optical microscope and irradiation spot beam-forming mask
Inventors:
Isao Shimizu, Seiji Aotani
Patented Case
View Patent ↗
Granted: Mar 1, 1994
Filed: Apr 23, 1992
Inventors
Isao Shimizu
Seiji Aotani
Assignees (at issue)
Isao Shimizu
Japan Synthetic Rubber Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.