IP Library Granted Patent US 5,294,564
Granted Patent Utility
US 5,294,564 · App. 08/028,607

Method for the directed modulation of the composition or doping of semiconductors, notably for the making of planar type monolithic electronic components, use of the method and corresponding products

Inventors: Leonidas Karapiperis, Didier Pribat
Patented Case View Patent ↗
Granted: Mar 15, 1994 Filed: Mar 8, 1993
Inventors
Leonidas Karapiperis
Didier Pribat
Assignee (at issue)
Thomson-CSF

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Quick Facts
Patent No.
US 5,294,564
App. No.
08/028,607
Filed
1993-03-08
Granted
1994-03-15
Kind
A