IP Library Granted Patent US 5,296,272
Granted Patent Utility
US 5,296,272 · App. 08/008,273

Method of implanting ions from a plasma into an object

Inventors: Jesse N. Matossian, Dan M. Goebel
Patented Case View Patent ↗
Granted: Mar 22, 1994 Filed: Jan 25, 1993
Inventors
Jesse N. Matossian
Dan M. Goebel
Assignee (at issue)
Hughes Aircraft Company

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Quick Facts
Patent No.
US 5,296,272
App. No.
08/008,273
Filed
1993-01-25
Granted
1994-03-22
Kind
A