Granted Patent
Utility
US 5,296,392 · App. 07/841,239
Method of forming trench isolated regions with sidewall doping
Inventors:
Gregory J. Grula, Walter Metz
Patented Case
View Patent ↗
Granted: Mar 22, 1994
Filed: Feb 24, 1992
Inventors
Gregory J. Grula
Walter Metz
Assignee (at issue)
Digital Equipment Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.