Granted Patent
Utility
US 5,300,628 · App. 07/906,183
Selected chelate resins and their use to remove multivalent metal impurities from resist components
Inventor:
Kenji Honda
Patented Case
View Patent ↗
Granted: Apr 5, 1994
Filed: Jun 29, 1992
Inventor
Kenji Honda
Assignee (at issue)
OCG Microelectronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.