IP Library › Granted Patent US 5,308,447
Granted Patent Utility
US 5,308,447 · App. 07/896,132

Endpoint and uniformity determinations in material layer processing through monitoring multiple surface regions across the layer

Inventors: Russell E. Lewis, Richard E. Howard, Herbert E. Litvak
Patented Case View Patent ↗
Granted: May 3, 1994 Filed: Jun 9, 1992
Inventors
Russell E. Lewis
Richard E. Howard
Herbert E. Litvak
Assignee (at issue)
Luxtron Corporation

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Quick Facts
Patent No.
US 5,308,447
App. No.
07/896,132
Filed
1992-06-09
Granted
1994-05-03
Kind
A