IP Library Granted Patent US 5,308,682
Granted Patent Utility
US 5,308,682 · App. 07/955,027

Alignment check pattern for multi-level interconnection

Inventor: Takenori Morikawa
Patented Case View Patent ↗
Granted: May 3, 1994 Filed: Oct 1, 1992
Inventor
Takenori Morikawa
Assignee (at issue)
NEC CORPORATION

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Quick Facts
Patent No.
US 5,308,682
App. No.
07/955,027
Filed
1992-10-01
Granted
1994-05-03
Kind
A