IP Library › Granted Patent US 5,308,786
Granted Patent Utility
US 5,308,786 · App. 08/127,052

Trench isolation for both large and small areas by means of silicon nodules after metal etching

Inventors: Water Lur, Jiunn Y. Wu, Anna Su
Patented Case View Patent ↗
Granted: May 3, 1994 Filed: Sep 27, 1993
Inventors
Water Lur
Jiunn Y. Wu
Anna Su
Assignee (at issue)
WINBOND ELECTRONICS CORP.

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Quick Facts
Patent No.
US 5,308,786
App. No.
08/127,052
Filed
1993-09-27
Granted
1994-05-03
Kind
A