IP Library › Granted Patent US 5,308,790
Granted Patent Utility
US 5,308,790 · App. 07/961,967

Selective sidewall diffusion process using doped SOG

Inventors: Derryl D. J. Allman, Gayle W. Miller
Patented Case View Patent ↗
Granted: May 3, 1994 Filed: Oct 16, 1992
Inventors
Derryl D. J. Allman
Gayle W. Miller
Assignee (at issue)
NCR Corporation

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Quick Facts
Patent No.
US 5,308,790
App. No.
07/961,967
Filed
1992-10-16
Granted
1994-05-03
Kind
A