Granted Patent
Utility
US 5,309,063 · App. 08/026,400
Inductive coil for inductively coupled plasma production apparatus
Inventor:
Bawa Singh
Patented Case
View Patent ↗
Granted: May 3, 1994
Filed: Mar 4, 1993
Inventor
Bawa Singh
Assignee (at issue)
David Sarnoff Research Center Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.