IP Library › Granted Patent US 5,312,764
Granted Patent Utility
US 5,312,764 · App. 08/068,339

Method of doping a semiconductor substrate

Inventors: Clifford Drowley, James A. Teplik, Erik Egan
Patented Case View Patent ↗
Granted: May 17, 1994 Filed: May 28, 1993
Inventors
Clifford Drowley
James A. Teplik
Erik Egan
Assignee (at issue)
Motorola, Inc.

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Quick Facts
Patent No.
US 5,312,764
App. No.
08/068,339
Filed
1993-05-28
Granted
1994-05-17
Kind
A