IP Library Granted Patent US 5,313,982
Granted Patent Utility
US 5,313,982 · App. 08/121,174

Gas supply piping device for a process apparatus

Inventors: Tadahiro Ohmi, Nakahara Fumio, Tuyosi Satoh, Masaru Umeda
Patented Case View Patent ↗
Granted: May 24, 1994 Filed: Sep 13, 1993
Inventors
Tadahiro Ohmi
Nakahara Fumio
Tuyosi Satoh
Masaru Umeda
Assignee (at issue)
Tadahiro Ohmi

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Quick Facts
Patent No.
US 5,313,982
App. No.
08/121,174
Filed
1993-09-13
Granted
1994-05-24
Kind
A