Granted Patent
Utility
US 5,314,843 · App. 07/858,670
Integrated circuit polishing method
Inventors:
Chris C. Yu, Gurtej S. Sandhu, Trung T. Doan
Patented Case
View Patent ↗
Granted: May 24, 1994
Filed: Mar 27, 1992
Inventors
Chris C. Yu
Gurtej S. Sandhu
Trung T. Doan
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.