Granted Patent
Utility
US 5,314,846 · App. 07/943,996
Method for processing a semiconductor wafer
Inventor:
Charles A. Boitnott
Patented Case
View Patent ↗
Granted: May 24, 1994
Filed: Sep 11, 1992
Inventor
Charles A. Boitnott
Assignee (at issue)
Atomel Products Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.