IP Library › Granted Patent US 5,315,113
Granted Patent Utility
US 5,315,113 · App. 07/953,429

Scanning and high resolution x-ray photoelectron spectroscopy and imaging

Inventors: Paul E. Larson, Paul W. Palmberg
Patented Case View Patent ↗
Granted: May 24, 1994 Filed: Sep 29, 1992
Inventors
Paul E. Larson
Paul W. Palmberg
Assignee (at issue)
PerkinElmer, Inc.

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Quick Facts
Patent No.
US 5,315,113
App. No.
07/953,429
Filed
1992-09-29
Granted
1994-05-24
Kind
A