IP Library Granted Patent US 5,316,642
Granted Patent Utility
US 5,316,642 · App. 08/052,496

Oscillation device for plating system

Inventors: David J. Young, Scott L. Randall, Scott David Shaw, Andrew F. Wylde
Patented Case View Patent ↗
Granted: May 31, 1994 Filed: Apr 22, 1993
Inventors
David J. Young
Scott L. Randall
Scott David Shaw
Andrew F. Wylde
Assignee (at issue)
Digital Equipment Corporation

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Quick Facts
Patent No.
US 5,316,642
App. No.
08/052,496
Filed
1993-04-22
Granted
1994-05-31
Kind
A