IP Library › Granted Patent US 5,316,965
Granted Patent Utility
US 5,316,965 · App. 08/099,136

Method of decreasing the field oxide etch rate in isolation technology

Inventors: Ara Philipossian, Hamid Soleimani, Brian S. Doyle
Patented Case View Patent ↗
Granted: May 31, 1994 Filed: Jul 29, 1993
Inventors
Ara Philipossian
Hamid Soleimani
Brian S. Doyle
Assignee (at issue)
Digital Equipment Corporation

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Quick Facts
Patent No.
US 5,316,965
App. No.
08/099,136
Filed
1993-07-29
Granted
1994-05-31
Kind
A