IP Library › Granted Patent US 5,316,979
Granted Patent Utility
US 5,316,979 · App. 08/038,879

RIE process for fabricating submicron, silicon electromechanical structures

Inventors: Noel C. MacDonald, Zuoying L. Zhang
Patented Case View Patent ↗
Granted: May 31, 1994 Filed: Mar 29, 1993
Inventors
Noel C. MacDonald
Zuoying L. Zhang
Assignee (at issue)
Cornell Research Foundation, Inc.

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Quick Facts
Patent No.
US 5,316,979
App. No.
08/038,879
Filed
1993-03-29
Granted
1994-05-31
Kind
A