IP Library › Granted Patent US 5,318,924
Granted Patent Utility
US 5,318,924 · App. 08/008,052

Nitridation of titanium-tungsten interconnects

Inventors: Jung-Hong Lin, John E. Turner
Patented Case View Patent ↗
Granted: Jun 7, 1994 Filed: Jan 22, 1993
Inventors
Jung-Hong Lin
John E. Turner
Assignee (at issue)
Hewlett-Packard Company, L.P.

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Quick Facts
Patent No.
US 5,318,924
App. No.
08/008,052
Filed
1993-01-22
Granted
1994-06-07
Kind
A