Granted Patent
Utility
US 5,320,680 · App. 07/691,470
Primary flow CVD apparatus comprising gas preheater and means for substantially eddy-free gas flow
Inventors:
Arthur J. Learn, Dale R. Du Bois, Nicholas Miller, Richard A. Seilheimer
Patented Case
View Patent ↗
Granted: Jun 14, 1994
Filed: Apr 25, 1991
Inventors
Arthur J. Learn
Dale R. Du Bois
Nicholas Miller
Richard A. Seilheimer
Assignee (at issue)
Silicon Valley Group, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.