Granted Patent
Utility
US 5,320,709 · App. 08/021,799
Method for selective removal of organometallic and organosilicon residues and damaged oxides using anhydrous ammonium fluoride solution
Inventors:
Bill Bowden, Debbie Switalski
Patented Case
View Patent ↗
Granted: Jun 14, 1994
Filed: Feb 24, 1993
Inventors
Bill Bowden
Debbie Switalski
Assignee (at issue)
Advanced Chemical Systems International Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.