IP Library › Granted Patent US 5,322,712
Granted Patent Utility
US 5,322,712 · App. 08/064,185

Process for improved quality of CVD copper films

Inventors: John Anthony Thomas Norman, Arthur Kenneth Hochberg, David A. Roberts
Patented Case View Patent ↗
Granted: Jun 21, 1994 Filed: May 18, 1993
Inventors
John Anthony Thomas Norman
Arthur Kenneth Hochberg
David A. Roberts
Assignee (at issue)
Air Products and Chemicals, Inc.

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Quick Facts
Patent No.
US 5,322,712
App. No.
08/064,185
Filed
1993-05-18
Granted
1994-06-21
Kind
A