IP Library Granted Patent US 5,323,082
Granted Patent Utility
US 5,323,082 · App. 07/346,798

Piezoelectric actuator for planar alignment

Inventor: David L. Wright
Patented Case View Patent ↗
Granted: Jun 21, 1994 Filed: May 3, 1989
Inventor
David L. Wright
Assignee (at issue)
Spectra Physics Lasers, Inc.

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Quick Facts
Patent No.
US 5,323,082
App. No.
07/346,798
Filed
1989-05-03
Granted
1994-06-21
Kind
A