IP Library › Granted Patent US 5,324,155
Granted Patent Utility
US 5,324,155 · App. 07/819,098

Wafer handling system with bernoulli pick-up

Inventors: Dennis L. Goodwin, Richard Crabb, McDonald Robinson, Armand P. Ferro
Patented Case View Patent ↗
Granted: Jun 28, 1994 Filed: Jan 9, 1992
Inventors
Dennis L. Goodwin
Richard Crabb
McDonald Robinson
Armand P. Ferro
Assignee (at issue)
Advanced Semiconductor Materials America, Inc.

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Quick Facts
Patent No.
US 5,324,155
App. No.
07/819,098
Filed
1992-01-09
Granted
1994-06-28
Kind
A