Granted Patent
Utility
US 5,324,685 · App. 08/015,384
Method for fabricating a multilayer epitaxial structure
Inventors:
Reinhold Hirtz, Gregory Zakaluk, Joseph Chan, Dennis Garbis, Lawrence LaTerza, Ali Salih
Patented Case
View Patent ↗
Granted: Jun 28, 1994
Filed: Feb 9, 1993
Inventors
Reinhold Hirtz
Gregory Zakaluk
Joseph Chan
Dennis Garbis
Lawrence LaTerza
Ali Salih
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.