Granted Patent
Utility
US 5,324,935 · App. 08/057,767
Scanning probe microscope having a directional coupler and a Z-direction distance adjusting piezoelectric element
Inventor:
Masatoshi Yasutake
Patented Case
View Patent ↗
Granted: Jun 28, 1994
Filed: May 7, 1993
Inventor
Masatoshi Yasutake
Assignee (at issue)
SEIKO INSTRUMENTS INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.