Granted Patent
Utility
US 5,326,035 · App. 07/867,692
High purity cleaning system
Inventors:
Tadahiro Ohmi, Michiya Kawakami, Yasuyuki Yagi, Makoto Ohwada, Kiyoshi Takahara
Patented Case
View Patent ↗
Granted: Jul 5, 1994
Filed: Sep 4, 1992
Inventors
Tadahiro Ohmi
Michiya Kawakami
Yasuyuki Yagi
Makoto Ohwada
Kiyoshi Takahara
Assignee (at issue)
Tadahiro Ohmi
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.