IP Library › Granted Patent US 5,326,547
Granted Patent Utility
US 5,326,547 · App. 08/053,527

Process for preparing polysilicon with diminished hydrogen content by using a two-step heating process

Inventors: Robert H. Allen, James E. Boone
Patented Case View Patent ↗
Granted: Jul 5, 1994 Filed: Apr 26, 1993
Inventors
Robert H. Allen
James E. Boone
Assignee (at issue)
ALBEMARLE CORPORATION

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Quick Facts
Patent No.
US 5,326,547
App. No.
08/053,527
Filed
1993-04-26
Granted
1994-07-05
Kind
A