Granted Patent
Utility
US 5,327,338 · App. 07/973,567
Scanning laser lithography system alignment apparatus
Inventors:
Paul C. Allen, Mike Bohan, Tim Thomas, Robin L. Teitzel
Patented Case
View Patent ↗
Granted: Jul 5, 1994
Filed: Nov 9, 1992
Inventors
Paul C. Allen
Mike Bohan
Tim Thomas
Robin L. Teitzel
Assignee (at issue)
ETEC SYSTEMS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.