IP Library › Granted Patent US 5,328,866
Granted Patent Utility
US 5,328,866 · App. 07/949,288

Low temperature oxide layer over field implant mask

Inventors: Mike F. Chang, David G. Grasso, Jun-Wei Chen
Patented Case View Patent ↗
Granted: Jul 12, 1994 Filed: Sep 21, 1992
Inventors
Mike F. Chang
David G. Grasso
Jun-Wei Chen
Assignee (at issue)
SILICONIX INCORPORATED

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Quick Facts
Patent No.
US 5,328,866
App. No.
07/949,288
Filed
1992-09-21
Granted
1994-07-12
Kind
A