Granted Patent
Utility
US 5,328,872 · App. 07/459,167
Method of integrated circuit manufacturing using deposited oxide
Inventors:
Ajit S. Manocha, Virendra V. Rana, James Roberts, Ankineedu Velaga
Patented Case
View Patent ↗
Granted: Jul 12, 1994
Filed: Dec 29, 1989
Inventors
Ajit S. Manocha
Virendra V. Rana
James Roberts
Ankineedu Velaga
Assignee (at issue)
AT&T Bell Laboratories
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.